Springless Diaphragm Valves (SP-Series)

The SP-series is a springless stainless steel diaphragm valve suitable for high performance applications.
Springless Diaphragm Valves (SF-Series)

The SF-series is a springless stainless steel diaphragm valve suitable for ultrahigh-purity applications.
Bellows-Metal Diaphragm Valves

The Fujikin pneumatically actuated bellows valves is a compact valve designed for ultra-pure, flammable or toxic fluid lines for all types of semiconductor equipment and facilities. The Fujikin bellows valve is the most successful valve in the semiconductor industry due to its superior performance, remarkable durability, compactness, ease of cleaning, and excelletn purge characteristics.
High-Durability Diaphragm Valves NEW MEGA-ONE LA NHD-Series

The NEW MEGA-ONE LA NHD is a pneumatically-actuated diaphragm valves for ultra-pure, flammable, or toxic fluid lines for all types of semiconductor equipment facilities. The direct diaphragm construction makes the NEW MEGA-ONE LA NHD an industry standard valve with superior sealing performance, remarkable durability and compactness, and particle- and dead-space-free performance. Technology developed through extensive […]
High-Temperature Diaphragm Valves MEGA-M LA-Series

MEGA-M LA is an all-metal valve for use in temperatures of up to 350°C (Exact temperature resistance will depend on operating conditions). When coupled with a dedicated heater, it significantly helps preventing deposists from adhering in high-temperature processes and gas exhaust systems.
NEW Compact Low and High Pressure Diaphragm Valves NEW MEGA-Series

The NEW MEGA-ONE LA is a pneumatically actuated diaphragm valves for ultra-pure, flammable or toxic fluid-lines for all type of semiconductor equipment and facilities. The direct diaphragm construction makes the NEW MEGA-ONE LA an industry standard valve with superior performance, remarkable durability and compactness while being particle-free and dead-space free. This valve has the same […]
Low and High Pressure Diaphragm Valves MEGA-Series

The MEGA-ONE LA is a pneumatically actuated diaphragm valves for ultra-pure, flammable or toxic fluid-lines for all type of semiconductor equipment and facilities. The direct diaphragm construction makes the MEGA-ONE LA an industry standard valve with superior performance, remarkable durability and compactness while being particle-free and dead-space free.
Ultra-High Purity TEE Block Diaphragm Valves

UPC / DPC Series Utilises all SPDS parts and advantages of the No.1 diaphragm valve for semiconductor applications, combined with the lowest dead space within any UHP valve on the market.
High Pressure Compact Diaphragm Valves CMDH-Series

The CMDH series manually operated diaphragm valves are designed for high performance gas and chemical distribution in high pressure applications. The manual multi-turn model supports superior media purity and safety through its springless packless design delivering high performance at high pressure ratings. The CMDH series handle is supplied with a open/close indicator which provides a […]
Low Pressure Compact Diaphragm Valves CMD-Series

The CMD series is a range of low pressure high performance compact diaphragm valves designed for high demanding applications in semiconductor manufacturing processes. The CMD series offers exceptional quality and value for the increasing challenges in ultra high purity gas delivery systems. Product features include the direct diaphragm design that offers exceptional sealing performance, reliability […]