The CMD series is a range of low pressure high performance compact diaphragm valves designed for high demanding applications in semiconductor manufacturing processes. The CMD series offers exceptional quality and value for the increasing challenges in ultra high purity gas delivery systems. Product features include the direct diaphragm design that offers exceptional sealing performance, reliability and safety with minimal particle generation and dead-space free. The CMD series can be specified in a variety of configurations, and with a range of options or accessories, to support a wide range of semiconductor fab equipments. The high performance capabilities makes the CMD range a natural selction for valve manifold boxes (VMB´s), valve manifold panels (VMP´s), Hook-up, Tool install and stic assembly applications. The CMD range is suitable for all inert gases and most toxic gases.

Low Pressure Compact Diaphragm Valves